Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-29T10:06:46.509Z Has data issue: false hasContentIssue false
  • English
  • Français

The Development of Scanning Microwave Microscope for High-Throughput Characterization of Dielectric and Conducting Materials at Low Temperatures

Published online by Cambridge University Press:  01 February 2011

Sohei Okazaki ,
Noriaki Okazaki ,
Hidetaka Sugaya ,
Xiaoru Zhao ,
Ken Hasegawa ,
Parhat Ahmet ,
Toyohiro Chikyow ,
Jun Nishimura ,
Tomoteru Fukumura  and
Masashi Kawasaki
...Show all authors
Sohei Okazaki
Affiliation:
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Noriaki Okazaki
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Hidetaka Sugaya
Affiliation:
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Xiaoru Zhao
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Ken Hasegawa
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Parhat Ahmet
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Toyohiro Chikyow
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Jun Nishimura
Affiliation:
Institute for Materials Research, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai 980–8577, Japan.
Tomoteru Fukumura
Affiliation:
Institute for Materials Research, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai 980–8577, Japan.
Masashi Kawasaki
Affiliation:
Institute for Materials Research, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai 980–8577, Japan.
Makoto Murakami
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Yuji Mastumoto
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Hideomi Koinuma
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan. Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Tetsuya Hasegawa
Affiliation:
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan. Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan. Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan. Department of Chemistry, The University of Tokyo, 7–3–1 Hongo, Bunkyo-ku, Tokyo 113–0033, Japan.
Get access

Abstract

We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 804: Symposium JJ – Combinatorial and Artificial Intelligence Methods in Materials Science II , 2003 , JJ9.21
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lu, Y., Wei, T., Duewer, F., Lu, Y., Ming, N., Schultz, P. G. and Xiang, X.-D., Science 276, 2004 (1997).Google Scholar
2. Takeuchi, I., Wei, T., Duewer, F., Yoo, Y. K., Xiang, X.-D., Talyansky, V., Pai, S. P., Chen, G. C. and Venkatesan, T., Appl. Phys. Lett. 71, 2026 (1997).Google Scholar
3. Gao, C. and Xiang, X.-D., Rev. Sci. Instrum. 69, 3846 (1998).Google Scholar
4. Yoo, Y-K., Duewer, F., Yang, H., Yi, D., Li, J-W. and Xiang, X.-D., Nature 406, 704 (2000).Google Scholar
5. Xiang, X.-D. and Gao, C., Mater. Charact. 48, 117 (2002).Google Scholar
6. Cho, Y., Atsumi, S. and Nakamura, K., Jpn. J. Appl. Phys. 36, 3152 (1997).Google Scholar
7. Okazaki, N., Odagawa, H., Cho, Y., Nagamura, T., Komiyama, D., Koida, T., Minami, H., Ahmet, P., Fukumura, T., Matsumoto, Y., Kawasaki, M., Chikyow, T., Koinuma, H. and Hasegawa, T., Appl. Surf. Sci. 189, 222 (2002).Google Scholar
8. Okazaki, N., Ahmet, P., Chikyow, T., Odagawa, H., Cho, Y., Fukumura, T., Kawasaki, M., Ohtani, M., Koinuma, H. and Hasegawa, T., Mat. Res. Soc. Symp. Proc. 700, 119 (2002).Google Scholar
9. Okazaki, N., Okazaki, S., Higuma, H., Miyashita, S. Cho, Y., Fukumura, T., Kawasaki, M., Murakami, M., Matsumoto, Y., Koinuma, H. and Hasegawa, T., Appl. Surf. Sci., in press.Google Scholar
10. Hasegawa, K., Ahmet, P., Okazaki, N., Hasegawa, T., Fujimoto, K., Watanabe, M., Chikyow, T. and Koinuma, H., Appl. Surf. Sci., in press.Google Scholar
11. Morooka, T., Tanaka, K., Odawara, A., Nakayama, S., Nagata, A., Ikeda, M., Chinone, K., Phys. C Supercond. Appl. 335, 127 (2000).Google Scholar
12. Matsumoto, Y., Murakami, M., Shono, T., Hasegawa, T., Fukumura, T., Kawasaki, M., Ahmet, P., Chikyow, T., Koshihara, H. and Koinuma, H., Science 291, 854 (2001).Google Scholar
13. Murakami, M., Matsumoto, Y., Nagano, M., Hasegawa, T., Kawasaki, M. and Koinuma, H., Appl. Surf. Sci., in press.Google Scholar
14. Kajimoto, R., Yoshizawa, H., Kawano, H., Kuwahara, H., Tokura, Y., Ohoyama, K. and Ohashi, M., Phys. Rev. B 60, 9506 (1999).Google Scholar