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Compositional Analysis and Electrical Property Measurements of CW Laser-Annealed InSb
Published online by Cambridge University Press: 15 February 2011
Abstract
Characteristics of CW Ar-ion laser annealed InSb has been studied; properties include stoichiometric composition analysis and electrical C-V measurements. The stoichiometry compositions of laser-annealed samples at different power levels and scan speeds have been studied using an electron microprobe technique. Results were compared with electrical C-V measurements using MOS structures.
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- Copyright © Materials Research Society 1982