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Characterization of Lead Zirconate-Titanate Thin Films Prepared by Pulsed Laser Deposition

Published online by Cambridge University Press:  15 February 2011

C. K. Chiang ,
W. Wong-Ng ,
P. K. Schenck ,
L. P. Cook ,
M. D. Vaudin ,
P. S. Brody ,
B. J. Rod  and
K. W. Bennett
C. K. Chiang
Affiliation:
National Institute of Standards and Technology Gaithersburg, MD 20899
W. Wong-Ng
Affiliation:
National Institute of Standards and Technology Gaithersburg, MD 20899
P. K. Schenck
Affiliation:
National Institute of Standards and Technology Gaithersburg, MD 20899
L. P. Cook
Affiliation:
National Institute of Standards and Technology Gaithersburg, MD 20899
M. D. Vaudin
Affiliation:
National Institute of Standards and Technology Gaithersburg, MD 20899
P. S. Brody
Affiliation:
Harry Diamond Laboratories Adelphi, MD 20783
B. J. Rod
Affiliation:
Harry Diamond Laboratories Adelphi, MD 20783
K. W. Bennett
Affiliation:
Harry Diamond Laboratories Adelphi, MD 20783
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Abstract

Dense smooth lead zirconate-titanate thin films have been prepared by excimer laser deposition. The as-deposited films are amorphous as indicated by x-ray powder patterns. Differential scanning calorimetry studies show that the film has a glass transition at 301 °C, and the amorphous to crystalline transformation takes place above 350°C to 650°C. Phase formation as a result of post-deposition heat treatment is described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 230: Symposium R – Phase Transformation Kinetics in Thin Films , 1991 , 321
Copyright
Copyright © Materials Research Society 1992

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References

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