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Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits
Published online by Cambridge University Press: 31 January 2011
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- Research/Researchers
- Information
- MRS Bulletin , Volume 34 , Issue 6: Nanofunctional Materials in Cancer Research , June 2009 , pp. 397
- Copyright
- Copyright © Materials Research Society 2009
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