Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-26T19:45:33.047Z Has data issue: false hasContentIssue false

Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits

Published online by Cambridge University Press:  31 January 2011

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Research/Researchers
Copyright
Copyright © Materials Research Society 2009