Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-05T14:38:56.658Z Has data issue: false hasContentIssue false

Advanced Column-IV Epitaxial Materials for Silicon-Based Optoelectronics

Published online by Cambridge University Press:  29 November 2013

Get access

Extract

Over the past decade or so, research in silicon-based heterostructures has evolved from a few seminal publications on the growth and physical properties of Si1−xGex heteroepitaxial layers to a technology currently entering large-scale commercial production for heterojunction bipolar transistors (HBTs). During this period, extensive work has taken place on the optoelectronic applications of Si/Si1−x Gex such as 1.3–1.55 μam detectors for optical communication, 2–12-μm infrared detectors for two-dimensional (2D) focal plane arrays for night vision and thermal imaging, and infrared emitters for chip-to-chip optical communication as well as waveguiding and modulators. The overall goal of this work has been to merge optoelectronic functionality with the very large-scale-integration and electronic signal processing capabilities of silicon to create a silicon-based “superchip.”

Type
Silicon-Based Optoelectronics
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Kasper, E., Herzog, H.J., and Kibbel, H., Appl. Phys. 8 (1975) p. 199.CrossRefGoogle Scholar
2.Manasevit, H.M., Gergis, I.S., and Jones, A.B., J. Electron. Mater. 12 (1983) p. 637.CrossRefGoogle Scholar
3.Bean, J.C., ShengT,T. T,T., Feldman, L.C., Fiory, A.T., and Lynch, R.T., Appl. Phys. Lett. 44 (1984) p. 102.CrossRefGoogle Scholar
4.People, R., Phys. Rev. B 32 (1985) p. 1405.CrossRefGoogle Scholar
5.Ahlgren, D.C., Gilbert, M., Greenberg, D., Jeng, S-J., Malinowski, J., Nguyen-Ngoc, D., Schonenberg, K., Stein, K., Groves, R., Walter, K., Sunderland, D., Harame, D.L., and Meyerson, B., Tech. Dig. Int. Electron Device Meeting (1996) p. 859.CrossRefGoogle Scholar
6.Luryi, S., Pearsall, T.P., Temkin, H., and Bean, J.C., IEEE Electron Device Lett. 7 (1986) p. 104.CrossRefGoogle Scholar
7.Splett, A., Zinke, T., Petermann, K., Kasper, E., Kibbel, H., Herzog, H-J., and Presting, H., IEEE Photonics Tech. Lett. 6 (1994) p. 59.CrossRefGoogle Scholar
8.Lin, T.L. and Maserjian, J., Appl. Phys. Lett. 57 (1990) p. 1422.CrossRefGoogle Scholar
9.Karunasiri, R.P.G., Park, J.S., and Wang, K.L., Appl. Phys. Lett. 59 (1991) p. 2588.CrossRefGoogle Scholar
10.Mi, Q., Xiao, X., Sturm, J.C., Lenchyshyn, L., and Thewalt, M.L.W., Appl. Phys. Lett. 60 (1992) p. 3177.CrossRefGoogle Scholar
11.Presting, H., Zinke, T., Splett, A., Kibbel, H., and Jaros, M., Appl. Phys. Lett. 69 (1996) p. 2376.CrossRefGoogle Scholar
12.Soref, R., Namavar, F., and Lorenzo, J.P., Proc. SPIE 1177 (1989) p. 175.CrossRefGoogle Scholar
13.Soref, R., Proc. IEEE 81 (1993) p. 1687.CrossRefGoogle Scholar
14.Abstreitet, G., Phys. World (UK) 5 (1992) p. 36.CrossRefGoogle Scholar
15.Houghton, D.C., Noel, J-P., and Rowell, N.L., in Silicon Molecular-Beam Epitaxy, edited by Bean, J.C., Iyer, S.S., and Wang, K.L. (Mater. Res. Soc. Symp. Proc. 220, Pittsburgh, 1991) p. 299.Google Scholar
16.Houghton, D.C., Gibbings, C., Tuppen, C., Lyons, M., and Halliwell, M., Appl. Phys. Lett. 56 (1990) p. 460.CrossRefGoogle Scholar
17.Van de Walle, C., Phys. Rev. B 34 (1986) p. 5621.CrossRefGoogle Scholar
18.Mii, Y.J., Xie, Y.H., Fitzgerald, E.A., Monroe, D., Theil, F.A., Weir, B.E., and Feldman, L.C., Appl. Phys. Lett. 59 (1991) p. 1611.CrossRefGoogle Scholar
19.Ismail, K., Rishton, S., Chu, J.O., Chan, K., and Meyerson, B.S., IEEE Electron Device Lett. 14 (1993) p. 348.CrossRefGoogle Scholar
20.Prinz, E.J., Garone, P.M., Schwartz, P.V., Xiao, X., and Sturm, J.C., IEEE Electron Device Lett. 12 (1991) p. 42.CrossRefGoogle Scholar
21.Slotboom, J.W., Streutker, B., Pruijmboom, A., and Gravesteijn, D.J., IEEE Electron Device Lett. 12 (1991) p. 486.CrossRefGoogle Scholar
22.Gnutzmann, U. and Clausecker, K., Appl. Phys. 3 (1974) p. 9.CrossRefGoogle Scholar
23.Posthill, J.B., Rudder, R.A., Hattangaddy, S.V., Fountain, C.G., and Markunas, R.J., Appl. Phys. Lett. 56 (1990) p. 734.CrossRefGoogle Scholar
24.Iyer, S.S., Eberl, K., LeGoues, F.K., Tsang, J.C., and Cardone, F., Appl. Phys. Lett. 60 (1992) p. 356.CrossRefGoogle Scholar
25.Eberl, K., Iyer, S.S., Zollner, S., Tsang, J.C., and LeGoues, F.K., Appl. Phys. Lett. 60 (1992) p. 3033.CrossRefGoogle Scholar
26.Hiroi, M., Miyanaga, K., and Tatsumi, T., in Ext. Abs. 1993 Conf. Solid State Dev. Mater. (Japan Society of Applied Physics, Makuhari, 1993) p. 934.Google Scholar
27.Regolini, J.L., Gisbert, F., Dolino, G., and Boucaud, P., Mater. Lett. 18 (1993) p. 57.CrossRefGoogle Scholar
28.Dietrich, B., Osten, H.J., Ruecker, H., Methfessel, M., and Zaumseil, P., Phys. Rev. B 49 (17) (1994) p. 185.CrossRefGoogle Scholar
29.Rueker, H., Methfessel, M., Bugiel, E., and Osten, H.J., Phys. Rev. Lett. 72 (1994) p. 3578.CrossRefGoogle Scholar
30.Demkov, A.A. and Sankey, O.F., Phys. Rev. B 48 (1993) p. 227.CrossRefGoogle Scholar
31.Jain, S.C., Osten, H.J., Dietrich, B., and Ruecker, H., Semicond. Sci. Technol. 10 (1995) p. 1289.CrossRefGoogle Scholar
32.Mitchell, T.O., Hoyt, J.L., and Gibbons, J.F., Appl. Phys. Lett. 71 (1997) p. 1688.CrossRefGoogle Scholar
33.Goorsky, M.S., Iyer, S.S., Eberl, K., LeGoues, F., Angilello, J., and Cardone, F., Appl. Phys. Lett. 60 (1992) p. 32758.CrossRefGoogle Scholar
34.Soref, R.A., J. Appl. Phys. 70 (1991) p. 2470.CrossRefGoogle Scholar
35.Boucaud, P., Francis, C., Julien, F.H., Lourtioz, J-M., Bouchier, D., Bodnar, S., Lambert, B., and Regolini, J.L., Appl. Phys. Lett. 64 (1994) p. 875.CrossRefGoogle Scholar
36.Amour, A.St., Liu, C.W., Sturm, J.C., LaCroix, Y., and Thewalt, M.L.W., Appl. Phys. Lett. 67 (1995) p. 3915.CrossRefGoogle Scholar
37.Lanzerotti, L.D., Amour, A. St., Liu, C.W., Sturm, J.C., Watanabe, J.K., and Theodore, N.D., IEEE Electron Device Lett. 17 (1997) p. 334.CrossRefGoogle Scholar
38.Chang, C.L., Amour, A. St., and Sturm, J.C., Tech. Dig. Int. Electronic Device Meeting (1996) p. 257;CrossRefGoogle Scholar
Chang, C.L., Amour, A. St., and Sturm, J.C., Appl. Phys. Lett. 70 (1997) p. 1557.CrossRefGoogle Scholar
39.Kolodzey, J., O'Neil, P.A., Zhang, S., Omer, B., Roe, K., Unruh, K., Swann, C., Waite, M., and Shah, S.I., Appl. Phys. Lett. 67 (1995) p. 1865.CrossRefGoogle Scholar
40.Brunner, K., Eberl, K., and Winter, W., Phys. Rev. Lett. 76 (1996) p. 303;CrossRefGoogle Scholar
Eberl, K., Brunner, K., and Winter, W., Thin Solid Films 194 (1997) p. 98.CrossRefGoogle Scholar
41.Houghton, D.C., Aers, G.C., Rowell, N.L., Brunner, K., Winter, W., and Eberl, K., Phys. Rev. Lett. 78 (1997) p. 2441.CrossRefGoogle Scholar
42.Hoyt, J., Rim, K., Mitchell, T.O., Rim, K., Singh, D.V., and Gibbons, J.F., Tech. Dig. 7th Int. Symp. Silicon MBE (Banff, Canada, 1997) p. 41.Google Scholar
43.Hoyt, J. (private communication).Google Scholar
44.Stein, B.L., Yu, E.T., Croke, E.T., Hunter, A.T., Laursen, T., Bair, A.E., Mayer, J.W., and Ahn, C.C., Appl. Phys. Lett. 70 (1997) p. 3413.CrossRefGoogle Scholar
45.Faschinger, K.W., Zerlauth, S., Bauer, G., and Palmetshofer, L., Appl. Phys. Lett. 67 (1995) p. 3933.CrossRefGoogle Scholar
46.Stolk, P.A., Eaglesham, D.J., Gossman, H-J., and Poate, J.M., Appl. Phys. Lett. 66 (1995) p. 1370.CrossRefGoogle Scholar
47.Lanzerotti, L.D., Sturm, J.C., Stach, E., Hull, R., Buyuklimanli, T., and Magee, C., Appl. Phys. Lett. 70 (1997) p. 3125.CrossRefGoogle Scholar
48.Terashima, K., Tajima, M., and Tatsumi, T., Appl. Phys. Lett. 57 (1990) p. 1925.CrossRefGoogle Scholar
49.Sturm, J., Manoharan, H., Lenchyshyn, L., Thewalt, M., Rowell, N., Noel, J-P., and Houghton, D., Phys. Rev. Lett. 66 (1991) p. 1362.CrossRefGoogle Scholar
50.Weber, J. and Alonso, M., Phys. Rev. B 40 (1989) p. 5683.CrossRefGoogle Scholar
51.Jenkins, D.W. and Dow, J.D., Phys. Rev. 36 (1987) p. 7994.CrossRefGoogle Scholar
52.Mader, K.A., Baldereschi, A., and von Känel, H., Solid State Commun. 69 (1989) p. 1123.CrossRefGoogle Scholar
53.Wegscheidel, W.Olajos, J., Menczigar, U., Dondl, W., and Abstreiter, G., J. Cryst. Growth 123 (1992) p. 75.CrossRefGoogle Scholar
54.He, G. and Atwater, H.A., Phys. Rev. 79 (1997) p. 1937.Google Scholar
55.Schmidt, O.G. and Eberl, K., Phys. Rev. Lett. In press.Google Scholar