EDS analysis of samples in a SEM or TEM are usually portrayed as a very simple process; just image your specimen, turn on the x-ray analyzer and all will be revealed about the chemistry of your sample. Unfortunately, that approach can be very misleading at best, and disastrous at worst. The analyst should get used to preparing himself for EDS x-ray analysis just like he or she does for any other process. A set of preparation steps should be followed until they become an unconscious method to be used before accepting the information coming from the EOS x-ray spectrum. After proper basic preparation, interpretation of the results and the selection of operating parameters is still very important due to the detailed nature of the specimen.

Preparation: The most basic need is for the EDS system to be calibrated. This can be a difficult or simple task depending on the age of the system.