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Unique Minilens Cooling System Results in a Compact TEM

Published online by Cambridge University Press:  14 March 2018

Dmitry Lysenkov*
Affiliation:
Carl Zeiss SMT AG, Nano Technology Systems Division, Oberkochen, Germany
William C. Monigle
Affiliation:
Carl Zeiss SMT AG, Nano Technology Systems Division, Peabody, MA

Extract

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Transmission electron microscopy (TEM) has been proven to be one of the most convenient and straight forward methods for resolving sub-nanometer structures. The use of these instruments in life sciences, materials sciences and in the semiconductor industry has contributed greatly to many significant advances. However, typical TEMs are very large, expensive and relatively complicated to operate. Fortunately, recent advances in TEM technology and product design have created a new TEM instrument that is very well suited to everyday applications in hospitals, universities and laboratories of all types. Able to fit in a small room, this new TEM does not require the expensive, extensive building modifications usually associated with a TEM installation.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2008

References

[1] Hawkes, P.W. ed., “Magnetic Electron Lenses”, Springer Verlag, p. 359 (1982)CrossRefGoogle Scholar