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Toward Quantitative Defect Analysis Using HREM
Published online by Cambridge University Press: 14 March 2018
Extract
The electron microscope has evolved to the level where it is now straightforward to record high-resolution images from thin samples (t~ to 20 nm) that are directly interpretable in terms of atomic arrangements. Whilst recorded images necessarily represent two-dimensional projections of the structure, many defects such as dislocations and interfaces may be linear or planar in nature and this might be expected to be amenable to detailed characterization. In this review, we briefly consider the recent significant progress that has been made in quantitative defect analysis using the high-resolution electron microscope and then discuss some drawbacks to the technique as well as potential scope for further improvements.
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- Copyright © Microscopy Society of America 1996
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