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Three-Dimensional Crystallographic Analysis Beyond EBSD Mapping: The Next Dimension

Published online by Cambridge University Press:  14 March 2018

J.J.L. Mulders  and
A. Gholinia
J.J.L. Mulders*
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
A. Gholinia*
Affiliation:
HKL Technology, Hobro, Denmark
*
[email protected]
[email protected]

Extract

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Since the early 1990s EBSD (Electron Back Scatter Diffraction) has been developed to become a mature crystallographic analysis technique at the micro and nano-scale. It is applied in a SEM (Scanning Electron Microscope) on samples with a very smooth and clean surface. It provides quantitative orientations of individual grains, and by mapping a larger area, multiple grain analysis, texture, and grain boundaries can be examined. As the useful information for the EBSD technique comes from a very shallow depth in the material (10 to 20nm), it is a surface analysis technique showing lateral 2D distributions of crystal orientations.

Type
Research Article
Information
Microscopy Today , Volume 14 , Issue 3 , May 2006 , pp. 34 - 37
Copyright
Copyright © Microscopy Society of America 2006

References

1- HKL Technology - Channel5 manual, Hobro, Denmark, 2004.Google Scholar
2- Mulders, J.J.L. and Day, A.P., Materials Science Forum, Vol. 495-497, pp237–242, 2005.CrossRefGoogle Scholar
3- Nave, M. D., Mulders, J. J. L., Gholinia, A., Twin characterisation using 2D and 3D EBSD, Chinese Journal of Stereology and Image Analysis, Vol. 10, No. 4, Dec. 2005, pp. 199–204.Google Scholar