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STEM Imaging of Lattice Fringes and beyond in a UHR In-Lens Field-Emission SEM

Published online by Cambridge University Press:  14 March 2018

Vinh Van Ngo ,
Mike Hernandez ,
Bill Roth  and
David C Joy
Vinh Van Ngo*
Affiliation:
Hitachi High Technologies America, Inc.
Mike Hernandez
Affiliation:
Hitachi High Technologies America, Inc.
Bill Roth
Affiliation:
Hitachi High Technologies America, Inc.
David C Joy
Affiliation:
EM Facility, University of Tennessee, Knoxville, TN
*
[email protected]

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The phase-contrast imaging of atomic lattices has now become commonplace for both Transmission Electron Microscopes (TEM) and Scanning Transmission Electron Microscopes (STEMs). Recently, however, bright-field STEM images of multi-wall carbon nanotubes (MWCNTs) recorded from an ultra-high resolution (UHR) in-lens field-emission scanning electron microscope (FE-SEM) operating at 30keV have also demonstrated lattice fringe resolution. One example of such an image containing multiple examples of fringe detail is shown in figure 1. The carbon lattice fringes were analyzed and their origin confirmed by the application of the FFT algorithms in the SMART image analysis program. The resulting power spectrum after thresholding to remove background noise (Figure 2) confirms that phase detail in the image extends down to about 5 Angstroms (0.5nm) and that well defined diffraction spots corresponding to a spacing of 3.4 Angstroms (0.34nm) generated by the (002) basal plane spacing of the graphite lattice are present.

Type
Research Article
Information
Microscopy Today , Volume 15 , Issue 2 , March 2007 , pp. 12 - 17
Copyright
Copyright © Microscopy Society of America 2007

References

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