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Spectral Image Analysis: Getting The most from all That Data

Published online by Cambridge University Press:  14 March 2018

P.G. Kotula
Affiliation:
Sandia National Laboratories
M.R. Keenan
Affiliation:
Sandia National Laboratories
R. Loehman
Affiliation:
Sandia National Laboratories

Extract

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How do you comprehensively analyze the chemistry of a microstructure with an SEM equipped with an energy-dispersive x-ray spectrometer (EDXS)? Prior to the 1990's there would have been perhaps two distinct and commercially available solutions to this problem. Firstly, you could have collected a number of point spectra each with a large number of counts and individually analyzed each one. The positive aspect of this, in principle, is that for each point the elemental correlations are maintained (e.g., a given point contains Al and O). The potential problem is that the region of the point analysis in question is not representative of the microstructure as a whole or subtle differences between different points could be missed. Additionally, point analyses are quite subjective and prone to missing potentially important regions of the microstructure.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2002

References

[1] Mott, R.B. and Friel, JJ, J. Microsc.-Oxford 193 (1996) 2.Google Scholar
[2] Kotula, P.G. et al., Microsc. Microanat. In press (2002).Google Scholar
[3] The automated x-ray spectral image analysis software is currently available from Thermo NORAN under the COMPASS product name.Google Scholar