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The Preparation of Mg, Cd and Zn Samples for Crystal Orientation Mapping with BKD in an SEM

Published online by Cambridge University Press:  14 March 2018

R.A. Schwarzer
R.A. Schwarzer*
Affiliation:
Institute of Physics, Clausthal University of Technology, Clausthal-Zellerfeld, Germany
*
[email protected]

Extract

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Backscatter Kikuchi Diffraction (BKD) from crystalline solids has been known since 1928. But only during the last decade, when sufficiently sensitive cameras, fast PCs and high-performance SEMs have been available, has this technique been developed into an invaluable tool for materials' science and geology. BKD is also known as “Backscatter Electron Diffraction” (EBSD) if referred to the commercial trademarked systems OXFORD/HKL “Channel” or EDAX-TSL “OIM”. Crystal Orientation Measurement/ Mapping (COM), without user intervention, is performed in an SEM by digitally scanning the beam spot across the specimen, acquiring and transferring one Backscatter Kikuchi Pattern (BKP) after another into the computer, indexing it, and calculating the crystal orientation of the grain under the beam spot. The sample is typically tilted by 70° towards a phosphor screen for pattern collection. Spatial resolution is in the range of <0.05 μm and accuracy is better than 0.5°.

Type
Research Article
Information
Microscopy Today , Volume 15 , Issue 2 , March 2007 , pp. 40 - 43
Copyright
Copyright © Microscopy Society of America 2007

References

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