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Passive Mirror Imaging through a Solid-State Back-Scattered Electron Detector

Published online by Cambridge University Press:  14 March 2018

Fabrizio Croccolo  and
Claudia Riccardi
Fabrizio Croccolo*
Affiliation:
Dipartimento di Fisica “G. Occhialini” and PLASMAPROMETEO Università degli Studi di Milano - Bicocca
Claudia Riccardi
Affiliation:
Dipartimento di Fisica “G. Occhialini” and PLASMAPROMETEO Università degli Studi di Milano - Bicocca
*
[email protected]

Extract

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The scanning electron microscope (SEM) is commonly used to obtain images of a wide variety of samples within a wide range of magnification factors from the order of 10 up to about 105×. This technique is usually applied, but not limited to, the investigation of conductive samples. This is because the interaction of the scanning beam with the sample generates a net charge on the sample surface. Thus, if the sample is conductive, the charge can be quickly disposed of to ground, away from the beam spot. If the sample in non-conductive, the sample becomes locally charged, giving rise to a distortion of the primary beam. In certain conditions, the charge stored on the sample is able to reflect back the incoming electrons, much like an electrostatic mirror.

Type
Research Article
Information
Microscopy Today , Volume 16 , Issue 2 , March 2008 , pp. 40 - 43
Copyright
Copyright © Microscopy Society of America 2008

References

[1] Joy, D. C. & Joy, C. S. (1996) Low Voltage Scanning Electron Microscopy. Micron, 27, 247-263.Google Scholar
[2] Clarke, D. R. & Stuart, P. R. (1970) An Anomalous Contrast Effect in the Scanning Electron Microscope. J. Phys. E: Sci. Instrum. 3, 705-707.Google Scholar
[3] Shaffner, T. J. & Van Veld, R.D. (1971) ‘Charging’ Effects In The Scanning Electron Microscope. J. Phys E, 4, 633-637.Google Scholar
[4] Croccolo, F. & Riccardi, C. (2008) Observation of the Ion-Mirror Effect during microscopy of insulating materials. J. Microsc., 229, 39-43.Google Scholar
[5] Cazaux, J. (1999) Some considerations on the secondary electron emission, δ, from e- irradiated insulators. J. Appl. Phys., 85, 1137-1147.Google Scholar
[6] Vallayer, B., Blaise, G., Treheux, D. (1999) Space charge measurement in a dielectric material after irradiation with a 30kV electron beam: Application to single crystals oxide trapping properties. Rev. Sci. Instrum. 70, 3102-3112.Google Scholar
[7] Thomson, C. D., Zayalov, V., Dennison, J. R., Corbridge, J. (2003) Electron emission properties of insulator materials pertinent to the International Space Station. Proceedings of the 8th Spacecraft Charging Technology Conference, October 20-24, 2003, Huntsville, Alabama.Google Scholar
[8] Belhaj, M., Odof, S., Msellak, K., Jbara, O. (2000) Time-dependent measurement of the trapped charge in electron irradiated insulators: Application to Al2O3-sapphire. J. Appl. Phys. 88, 2289-2294.Google Scholar
[9] Belhaj, M., Jbara, O., Ziane, D. J., Fakhfakh, S. (2001) Charge trapping/detrap¬ping measurement in electron irradiated insulators in SEM. Proceedings of the 4th International Conference on Electric Charges in Non-Conductive Materials, Tours (France), 338-341.Google Scholar
[10] Jbara, O., Fakhfakh, S., Belhaj, M., Cazaux, J., Rau, E. I., Filippov, M. N., Andrianov, M. V. (2002) A new experimental approach for characterizing the internal trapped charge and electric field build up in ground-caoted insulators during their e- irradiation. Nucl. Instr. And Meth. In Phys. Res. B. 194, 302-310.CrossRefGoogle Scholar
[11] Jbara, O., Fakhfakh, S., Belhaj, M., Rondot, S. (2004) Charge implantation mea¬surement on electron-irradiated insulating materials by means of a SEM technique. Microsc. Microanal. 10, 679-710.CrossRefGoogle Scholar
[12] Wintle, H. J. (1999) Analysis of the scanning electron microscope mirror method for studying space charge in insulators. J. Appl. Phys., 11, 5961-5967.CrossRefGoogle Scholar