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Nondestructive, High-Resolution Materials Characterization with the Confocal Raman-AFM

Published online by Cambridge University Press:  14 March 2018

U. Schmidt ,
A. Jauss ,
W. Ibach ,
K. Weishaupt  and
O. Hollricher
U. Schmidt*
Affiliation:
WITec GmbH, Ulm, Germany
A. Jauss
Affiliation:
WITec GmbH, Ulm, Germany
W. Ibach
Affiliation:
WITec GmbH, Ulm, Germany
K. Weishaupt
Affiliation:
WITec GmbH, Ulm, Germany
O. Hollricher
Affiliation:
WITec GmbH, Ulm, Germany
*
[email protected]

Extract

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Materials research, biomedical research, and semiconductor manufacturing can all benefit from nondestructive, high-resolution methods of analysis. As most materials are heterogeneous, it is important to not only acquire high resolution topographic information, but also to identify the chemical composition of samples. A combination of high resolution microscopy with chemically sensitive spectroscopy combined in one instrument allows the detailed characterization of samples with different analytical techniques. When individual instruments are used, returning to a previously surveyed sample area can be very time consuming if not impossible without surface markers.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 3 , May 2005 , pp. 30 - 35
Copyright
Copyright © Microscopy Society of America 2005

References

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