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New Ion Probe for Next Generation FIB, SIMS, and Nano-Ion Implantation

Published online by Cambridge University Press:  15 September 2009

N. S. Smith ,
P. P. Tesch ,
N. P. Martin  and
R. W. Boswell
N. S. Smith*
Affiliation:
Oregon Physics, 2704 SE 39th Loop, Suite 109, Hillsboro, Oregon 97123
P. P. Tesch
Affiliation:
Oregon Physics, 2704 SE 39th Loop, Suite 109, Hillsboro, Oregon 97123
N. P. Martin
Affiliation:
Oregon Physics, 2704 SE 39th Loop, Suite 109, Hillsboro, Oregon 97123
R. W. Boswell
Affiliation:
Australian National University, Canberra, A.C.T.200, Australia
*
*Email: [email protected]

Extract

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HyperionTM is a newly developed high-performance ion source that significantly advances the capabilities of many ion beam techniques used by material scientists and engineers. Hyperion has been developed to provide focused beams as small as 10 nm, beam currents up to several micro-Amps, and a broad range of ion species that include He+, O2+, Xe+ and H3+.

Type
Instrumentation
Information
Microscopy Today , Volume 17 , Issue 5 , September 2009 , pp. 18 - 23
Copyright
Copyright © Microscopy Society of America 2009