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New Developments in Gemini® Fesem Technology

Published online by Cambridge University Press:  14 March 2018

H. Jaksch  and
J-P Vermeulen
H. Jaksch
Affiliation:
Carl Zeiss SMT Oberkochen, Germany
J-P Vermeulen*
Affiliation:
Carl Zeiss SMT Oberkochen, Germany
*
[email protected]

Extract

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The Field Emission SEM was introduced to improve imaging resolution available with conventional SEMs with a tungsten source. Thermal assisted or Schottky Field Emission SEMs were introduced in s the nineties by a number of companies as a stable source to overcome the beam instability of the cold FESEMs introduced earlier. The Gemini® based Field Emission SEM launched by Zeiss 12 years ago has been designed from the beginning as a high stability FESEM with a relatively large multi-ported chamber. The drive to develop Gemini® technology was the need for a FESEM capable of ultra-high resolution performance over the entire accelerating voltage range that also possessed the flexibility needed for a wide range of analytical applications.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 2 , March 2005 , pp. 8 - 11
Copyright
Copyright © Microscopy Society of America 2005

References

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