Hostname: page-component-78c5997874-xbtfd Total loading time: 0 Render date: 2024-11-19T11:33:49.943Z Has data issue: false hasContentIssue false

The Moving Finger Writes: Carbon Nanotubes as AFM Probe Tips

Published online by Cambridge University Press:  14 March 2018

Katerina Moloni*
Affiliation:
nPoint, Inc.

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

After carbon nanotubes (CNT) were discovered in 1991, many applications have been proposed that utilize their extraordinary electrical and mechanical properties. One application is as tips for scanning probe microscopy where CNTs offer several advantages including high resolution and the capability to image deep, narrow structures. A recent study of CNT scanning probes for atomic force microscopy (AFM) in semiconductor surface science concluded that an AFM with CNT tips has immense potential as a surface characterization tool in integrated circuit manufacture. Previously researchers had to construct their own CNT probes, but recently CNT AFM probes have become commercially available.

Carbon nanotubes (sometimes called buckytubes) are closed seamless shells ot graphitic carbon typically one to tens of nanometers in diameter and several micrometers long. The structure of a closed-dome single-walled nanotube is illustrated in Figure 1. Carbon nanotube probe tips offer several advantages.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2004

References

1. Iijima, S., “Helical micro-tubules of graphitic carbon,” Nature 354, p. 56(1991).CrossRefGoogle Scholar
2. Dai, H., Hafner, J. H., Rinzler, A. G., Colbert, D. T., and Smalley, R. E., “Nanotubes as nanoprobes in scanning probe microscopy,” Nature 384, pp. 147150 (1996).Google Scholar
3. Moloni, K., Lal, A., and Lagally, M. G., “Sharpened carbon nanontube probes,” Proc. SPIE 4098, pp. 7683 (2000).Google Scholar
4. Nguyen, C.V., et al., “Carbon nanotube tip probes: Stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors,” Nanotechnology 12, pp. 363367 (2001).CrossRefGoogle Scholar
5. Larsen, T., Moloni, K., Flack, F., Eriksson, M.A., Lagally, M.G., and Black, C.T., “Comparison of wear characteristics of etched-silicon and carbon nanotube atomic-force microscopy probes,” APL 80 (1l), pp 19961998 (2002).Google Scholar
6. Shin, J., Han, G., Ma, Y., Moloni, K., and Cerrina, F., “Resist edge line roughness and aerial image contrast,” J. Vac. Sci. Technol, B 19(5), pp. 28902895 (Nov/Dec 2001).Google Scholar
7. Ma, Y., Shin, J., and Cerrina, F., “Line edge roughness and photoresist percolation development model,” J. Vac. Sci. Technol. B 21(1), pp. 112117 (Jan/Feb 2003).CrossRefGoogle Scholar
8. Shin, J. and Cerrina, F., “Carbon Nanotubes Application to Sub-100-nm Pattern Metrology,” Semiconductor Research Corp. (unpublished), 17 July 2001.Google Scholar
9. Shin, J., Han, G., Cerrina, F., and Moloni, K., “Resist line-edge roughness and aerial image contrast,” Semiconductor Research Corp. (unpublished), 17 July 2001.Google Scholar
10. Lewis, R.,“From Ruckyballs to Nanotubes: Carbon nanotube atomic force microscopy probes Alzheimer's disease,” The Scientist 15(4), p. 8 (19 Feb 2001).Google Scholar
11. Wong, S.S., et al., Carbon nanotube tips: High-resolution probes for imaging biological systems,” J. Am. Chem. Soc. 120, pp. 603604 (1998).CrossRefGoogle Scholar
12. Li, J. and Cassell, A., “Carbon Nanotube-Tips for MAC Mode AFM Measurements in Liquids,” Application Note, Molecular Imaging, Inc., Phoenix. AZ.Google Scholar
13. Wong, S.S., Joselevich, E., Woolley, A.T., Cheung, C.L., and Lieber, C.M., “Covalently functionalized nanotubes as nanometre-sized probes in chemistry and biology,” Nature 394, pp. 5255 (1998).Google Scholar
14. Boul, P.J., et al., “Reversible Sidewall Functionalization of Buckytubes,” Chem. Phys. Lett. 310, pp. 367372(1999).Google Scholar
15. Zhang, G., Jiang, X., and Wang, E., Science 300, pp. 472-474 (18 April 2003).Google Scholar