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Methods To Identify Contaminants On Photoresists

Published online by Cambridge University Press:  14 March 2018

Wesley Nieveen*
Affiliation:
Surface Science Laboratories

Extract

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Contaminants on photoresist can be difficult to identify, especially if they are very thin, e.g., less than 0.5 μm. It is very doubtful at the 0.2 μm realm that histological or optical microscopy methods will work, There are several methods available to identify such contaminants1 each giving different degrees or type of information about contaminants.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 1998