Scanning Probe Microscopy (SPU) is a versatile tool for the investigations of surfaces. Additionally to the three-dimensional examination of surface topography, local mechanical or electrical properties can be measured1. In this work we present a short contribution on the performance and reliability of piezoelectric transducers in a SPM, which take care of the fine positioning of the tip relative to the sample. Some of the calibration procedures known in literature [cited in 2] are: laser interferometry, scanning a slightly tilted surface, a grid, a crystallographic or artificial step of a known height or by using a reference piezo. To measure slow and fast piezo response simultaneously, we use a non-contact calibration procedure with a high dynamic range (Angstrom to several hundred micrometers) and high frequency range (D.C. to 200 kHz(-3dB)).