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Limits of SEM Resolution

Published online by Cambridge University Press:  14 March 2018

David C. Joy
David C. Joy*
Affiliation:
University of Tennessee & Oak Ridge National Laboratory

Extract

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Over the past decade the achievable resolution of the scanning electron microscope (SEM) in secondary electron (SE) imaging mode has improved by about one order of magnitude. In fact, instruments capable of demonstrating a resolution of one nanometer and exhibiting a probe size of less than 0.6 nm are not available. Continued improvements in electronoptics, electron sources, and in electronic and mechanical stability promise even smaller probe sizes that still contain adequate current for imaging, it is therefore relevant to consider what resolution might ultimately be achievable with an SEM in SE mode.

Type
Research Article
Information
Microscopy Today , Volume 4 , Issue 5 , June 1996 , pp. 10 - 11
Copyright
Copyright © Microscopy Society of America 1996

References

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5.Oak Ridge National Laboratory is managed by Martin Marietta Energy Systems Inc under contract DE-AC05-84OR21400 with the U.S Department of Energy.Google Scholar