Published online by Cambridge University Press: 14 March 2018
Images produced by an atomic forces microscope (AFM) often contain spurious features and image distortion that can render accurate imaging and metrology suspect. These “artifacts” are caused by the manner in which the image is produced. Artifacts can originate from the probe tip geometry, scanner non-linearity, image processing software, vibration, sample contamination, electronic noise, and poor sample stability. This article describes and illustrates common AFM image artifacts and suggests means to eliminate or minimize them.