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Hardware and Techniques for Cross- Correlative TEM and Atom Probe Analysis

Published online by Cambridge University Press:  14 March 2018

Brian P. Gorman*
Affiliation:
Dept. of Mat. Sci. and Eng. and Center for Advanced Research and Technology, University of North Texas, Denton, TX
David Diercks
Affiliation:
Dept. of Mat. Sci. and Eng. and Center for Advanced Research and Technology, University of North Texas, Denton, TX
Norman Salmon
Affiliation:
Hummingbird Scientific Instruments, Salem, OR
Eric Stach
Affiliation:
Hummingbird Scientific Instruments, Salem, OR
Gonzalo Amador
Affiliation:
Omniprobe, Inc., Dallas, TX
Cheryl Hartfield
Affiliation:
Omniprobe, Inc., Dallas, TX

Extract

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Atom probe tomography has primarily been used for atomic scale characterization of high electrical conductivity materials. A high electrical field applied to needle-shaped specimens evaporates surface atoms, and a time of flight measurement determines each atom's identity. A 2-dimensional detector determines each atom's original position on the specimen. When repeated successively over many surface monolayers, the original specimen can be reconstructed into a 3-dimensional representation. In order to have an accurate 3-D reconstruction of the original, the field required for atomic evaporation must be known a-priori. For many metallic materials, this evaporation field is well characterized, and 3-D reconstructions can be achieved with reasonable accuracy.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2008

References

1. Miller, M.K. (2000). Atom Probe Tomography: Analysis at the Atomic Level. New York: Kluwer Academic.Google Scholar
2. Kelly, T. F., et. al. (2004) First Data from a Commercial Local Electrode Atom Probe. Microsc. Microanal. 10, 373-383.Google Scholar
3. Thompson, K., et. al. (2007) In-situ Site-specific Specimen Preparation for Atom Probe Tomography. Ultramicroscopy 107, 131-139.CrossRefGoogle Scholar
4. Kelly, T. F., et. al. (2007) Atom Probe Tomography of Electronic Materials. Ann. Rev. Mat. Res. 37, 681-727.CrossRefGoogle Scholar
5. Gorman, B. P. , Norman, A. G., Yan, Y. (2007). Atom Probe Analysis of III-V and Si-based Photovoltaic Structures. Microsc. Microanal. 13, 493-502.Google Scholar
6. Gorman, B. P., et. al. (2008) Cross-Correlative TEM and Atom Probe Analysis of Partial Crystallization in NiNbSn Metallic Glasses. Mat. Sci. and Tech. in print.Google Scholar
7. Gorman, B. P., Diercks, D. R, Jaeger, D. (2008) Cross-correlative TEM and Atom Probe Tomography. Microsc. Microanal. Suppl. 2, in print.Google Scholar
8. Moore, T. M. (2006) Apparatus for Preparing a TEM Sample Holder. U. S. Patent 7126132.Google Scholar