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A FIB Micro-Sampling Technique for Three-Dimensional Characterization of a Site-Specific Defect

Published online by Cambridge University Press:  14 March 2018

Toshie Yaguchi ,
Yasushi Kuroda ,
Mitsuru Konno ,
Takeo Kamino ,
Tsuyohsi Ohnishi ,
Takahito Hashimoto ,
Kaoru Umemura  and
Kyoichiro Asayama
Toshie Yaguchi
Affiliation:
Hitachi Science Systems, Ltd., Japan
Yasushi Kuroda
Affiliation:
Hitachi Science Systems, Ltd., Japan
Mitsuru Konno
Affiliation:
Hitachi Science Systems, Ltd., Japan
Takeo Kamino
Affiliation:
Hitachi Science Systems, Ltd., Japan
Tsuyohsi Ohnishi
Affiliation:
Hitachi High-Technologies Corporation, Japan
Takahito Hashimoto
Affiliation:
Hitachi High-Technologies Corporation, Japan
Kaoru Umemura
Affiliation:
Hitachi High-Technologies Corporation, Japan
Kyoichiro Asayama
Affiliation:
Renesas Technology Corp., Japan

Extract

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In characterization or failure analysis of new materials and semiconductor devices, the requirements for three dimensional observation and analysis are rapidly increasing. We discuss techniques for specimen preparation, three-dimensional observation, and elemental analysis of semiconductor devices that we developed using a system consisting of a dedicated focused ion beam (FIB) instrument and a scanning transmission electron microscope (STEM). The system utilizes a FIB-STEM compatible specimen holder with a specially designed rotation mechanism, which allows 360° rotation of a specimen on a conical stage (needle stub) around the ion beam axis of the FIB system and 360° rotation perpendicular to the electron beam in the STEM. A piece of sample (micro sample) is extracted from a specific-site by the micro-sampling technique and mounted on the needle stub. Instruments used in the study are the Hitachi FB-2100 FIB system with a micro-sampling attachment and the HD-2300 field emission 200kV STEM.

Type
Research Article
Information
Microscopy Today , Volume 12 , Issue 6 , November 2004 , pp. 26 - 29
Copyright
Copyright © Microscopy Society of America 2004

References

1) Yaguchi, T., Konno, M., Kamino, T., Hashimoto, T., Ohnishi, T., Umemura, K. and Asayama, K., Proc. Microsc. Microanal. 9 (Suppl .2) (2003) 118–119.CrossRefGoogle Scholar
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