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Development of a 200kV Atomic Resolution Analytical Electron Microscope

Published online by Cambridge University Press:  14 March 2018

T. Isabell ,
J. Brink ,
M. Kawasaki ,
B. Armbruster ,
I. Ishikawa ,
E. Okunishi ,
H. Sawada ,
Y. Okura ,
K. Yamazaki  and
T. Ishikawa
...Show all authors
T. Isabell*
Affiliation:
JEOL USA, Inc., Peabody, MA USA
J. Brink
Affiliation:
JEOL USA, Inc., Peabody, MA USA
M. Kawasaki
Affiliation:
JEOL USA, Inc., Peabody, MA USA
B. Armbruster
Affiliation:
JEOL USA, Inc., Peabody, MA USA
I. Ishikawa
Affiliation:
JEOL Ltd., Akishima, Japan
E. Okunishi
Affiliation:
JEOL Ltd., Akishima, Japan
H. Sawada
Affiliation:
JEOL Ltd., Akishima, Japan
Y. Okura
Affiliation:
JEOL Ltd., Akishima, Japan
K. Yamazaki
Affiliation:
JEOL Ltd., Akishima, Japan
T. Ishikawa
Affiliation:
JEOL Ltd., Akishima, Japan
M. Kawazu
Affiliation:
JEOL Ltd., Akishima, Japan
M. Hori
Affiliation:
JEOL Ltd., Akishima, Japan
M. Terao
Affiliation:
JEOL Ltd., Akishima, Japan
M. Kanno
Affiliation:
JEOL Ltd., Akishima, Japan
S. Tanba
Affiliation:
JEOL Ltd., Akishima, Japan
Y. Kondo
Affiliation:
JEOL Ltd., Akishima, Japan
*
[email protected]

Extract

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Few electron optical inventions have revolutionized the TEM/ STEM as profoundly as the spherical aberration (Cs) corrector has. Characterization of technologically important materials increasingly needs to be done at the atomic or even sub-atomic level. This characterization includes determination of atomic structure as well as structural chemistry. With Cs correctors, the sub-Angstrom imaging barrier has been passed, and fast atomic scale spectroscopy is possible. In addition to improvements in resolution, Cs correctors offer a number of other significant improvements and benefits.

Type
Research Article
Information
Microscopy Today , Volume 17 , Issue 3 , May 2009 , pp. 8 - 11
Copyright
Copyright © Microscopy Society of America 2009

References

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