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Cross-sectional TEM Sample Preparation for Nanowires or Porous Films Grown on a Substrate

Published online by Cambridge University Press:  14 March 2018

Chengyu Song*
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley National Laboratory

Extract

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Nanowires or porous films grown on a substrate normally lack mechanical strength, and may be subject to damage during specimen preparation. When we made cross-sectional TEM specimen for this type of sample, we modified the traditional method by covering the sample with epoxy to improve the film strength, and applying single-section ion milling to protect the film from over-milling.

The sample surface is first covered with G1 epoxy. We choose G1 for this application because it is relatively thick and cures at low temperature. For samples with a dense-growth of nanowires or a thick porous film, a brief moment in vacuum helps to get rid of the air bubbles in the epoxy. The glue is cured at 100 degree C for 10 minutes, until its color turns to a reddish brown. To remove the excess glue and flatten the surface, the sample is then ground and polished until the glue is less than 0.1 mm thick.

Type
Microscopy 101
Copyright
Copyright © Microscopy Society of America 2007