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Challenges and Opportunities for Focused Ion Beam Processing at the Nano-Scale

Published online by Cambridge University Press:  15 September 2009

J. Gierak*
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
B. Schiedt
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
D. Lucot
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
A. Madouri
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
E. Bourhis
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
G. Patriarche
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
C. Ulysse
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
X. Lafosse
Affiliation:
LPN/CNRS, Route de Nozay, F-91460 Marcoussis, France
L. Auvray
Affiliation:
MPI, Université d'Évry Val d'Essonne, Bd. François Mitterrand, 91025 Évry Cedex, France
L. Bruchhaus
Affiliation:
RAITH GmbH, Hauert 18, Technologiepark, D-44227 Dortmund, Germany
R. Jede
Affiliation:
RAITH GmbH, Hauert 18, Technologiepark, D-44227 Dortmund, Germany

Extract

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There is a solid consensus that new methods of structure fabrication, placement, and organization within the sub-10-nm resolution gap are urgently required to meet existing challenges in condensed matter, semiconductors, and biotechnologies. Standard top-down methods such as resist-based lithographies even used at the shortest available wavelengths have clearly identified limitations. On the other hand, bottom-up approaches, like scanning probe manipulation techniques, remain challenging when trying to generate reproducible, functional, and addressable nano-structures. Therefore, at the laboratory level new routes must be explored.

Type
Instrumentation
Copyright
Copyright © Microscopy Society of America 2009