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Applications of Multibeam SEM/FIB Instrumentation in the Integrated Sciences

Published online by Cambridge University Press:  26 June 2009

G. McMahon ,
J. Rybczynski ,
Y. Wang ,
Y. Gao ,
D. Cai ,
P. Dhakal ,
N. Argenti ,
K. Kempa ,
Z.F. Ren  and
N. Erdman
...Show all authors
G. McMahon*
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467
J. Rybczynski
Affiliation:
Solasta Inc., Newton, MA 02458
Y. Wang
Affiliation:
Solasta Inc., Newton, MA 02458
Y. Gao
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467
D. Cai
Affiliation:
Department of Biology, Boston College, Chestnut Hill MA 02467
P. Dhakal
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467
N. Argenti
Affiliation:
Solasta Inc., Newton, MA 02458
K. Kempa
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467 Solasta Inc., Newton, MA 02458
Z.F. Ren
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467 Solasta Inc., Newton, MA 02458
N. Erdman
Affiliation:
JEOL USA Ltd., Peabody, MA 01960
M.J. Naughton
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467 Solasta Inc., Newton, MA 02458
*
*[email protected]

Extract

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The Hague, Netherlands, 1690. Christiaan Huygens and Sir Isaac Newton, at odds with their competing wave/particle theories of light, today reached a compromise with their unveiling of a new multibeam SEM/FIB instrument featuring an SEM column designed by Huygens that uses electromagnetic lenses to focus the beam of electrons and a FIB column employing electrostatic lenses to focus the beam of ions devised by Newton. Onlookers were dazzled by its extensive capabilities and range of applications.

Type
Instrumentation
Information
Microscopy Today , Volume 17 , Issue 4 , July 2009 , pp. 34 - 39
Copyright
Copyright © Microscopy Society of America 2009