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Another Way to Implement Diffraction Contrast in SEM

Published online by Cambridge University Press:  14 March 2018

Xiaodong Tao  and
Alwyn Eades
Xiaodong Tao*
Affiliation:
Lehigh University, Bethlehem, PA
Alwyn Eades*
Affiliation:
Lehigh University, Bethlehem, PA
*
[email protected]
[email protected]

Extract

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SEM users are familiar with two forms of contrast in SEM images: topographic contrast and atomic number contrast. We can now add a third form of contrast. Contrast can arise due to the different orientation of grains in the sample. However, in normal operation this con trast is very weak, since in the SEM the beam includes a range of incident angles. This has the effect of averaging out diffraction contrast from the different orientations of the grains. This contrast is generally much stronger when the trast is very weak, since in the SEM the beam includes a range of incident angles. This has the effect of averaging out diffraction contrast from the different orientations of the grains. This contrast is generally much stronger when the incident beam is an ion beam rather than an electron beam — contrast between the grains is strong in ion-beam images but not in normal SEM images.

Type
Research Article
Information
Microscopy Today , Volume 11 , Issue 2 , April 2003 , pp. 36 - 38
Copyright
Copyright © Microscopy Society of America 2003

References

1. Joy, C. David, Dale, E. Newbury and David L. Davidson J, Appl. Phys.P voL53f No.8 R81-R122.Google Scholar
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3.We are grateful to TSL for allowing us to use their source code.Google Scholar
4.Support from DOE, under grant DE-FG02-00ER45819, is gratefully acknowledged.Google Scholar