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An Introduction to the Helium Ion Microscope

Published online by Cambridge University Press:  14 March 2018

John Morgan ,
John Notte ,
Raymond Hill  and
Bill Ward
John Morgan*
Affiliation:
ALIS Corporation, Peabody, MA
John Notte
Affiliation:
ALIS Corporation, Peabody, MA
Raymond Hill
Affiliation:
ALIS Corporation, Peabody, MA
Bill Ward
Affiliation:
ALIS Corporation, Peabody, MA
*
[email protected]

Extract

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In order to get high resolution images from any scanning beam microscope one must be able to produce a sufficiently small probe, have a small interaction volume in the substrate and have an abundance of information-rich particles to collect to create the image. A typical scanning electron microscope is able to meet all of these requirements to some degree. However, a helium ion microscope based on a Gas Field Ion Source (GFIS) has significant advantages over the SEM in all three categories.

Type
Research Article
Information
Microscopy Today , Volume 14 , Issue 4 , July 2006 , pp. 24 - 31
Copyright
Copyright © Microscopy Society of America 2006

References

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[3] Orloff, Jon (editor), “Handbook of Charged Particle Optics,” CRC Press, (1997).Google Scholar