Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-26T00:56:10.203Z Has data issue: false hasContentIssue false

An Aberration Corrected (S)TEM Microscope for Nanoresearch

Published online by Cambridge University Press:  14 March 2018

S. Kujawa*
Affiliation:
FEI Company, Eindhoven, The Netherlands
B. Freitag
Affiliation:
FEI Company, Eindhoven, The Netherlands
D. Hubert
Affiliation:
FEI Company, Eindhoven, The Netherlands

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

The continued focus on improving materials, combined with the fact that it is now commonly understood that material properties are affected by characteristics at the atomic level, give rise to the need to characterize and image at the best resolutions possible. The (Scanning) Transmission Electron Microscope ((S)TEM) has the capability to image structures with atomic resolution and provides, at the same time, information on the chemical composition, bonding and electronic structure of the material. The nanoresearcher's continued need for the ultimate resolution has accelerated the development of next generation electron optics and technology.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2005

References

1. Scherzer, O. Über einige Fehler von Elektronenlinsen. Z. Physik 101, 593603 (1936).CrossRefGoogle Scholar
2. Haider, M. et al. Electron microscopy image enhanced. Nature 392, 768769 (1998).CrossRefGoogle Scholar
3. Rose, H. Abbildungseigenschaften sphärisch korrigierter elektronenoptischer Achromate. Optik 33, 124 (1971).Google Scholar
4. Freitag, B. et al, Breaking the spherical and chromatic aberration barrier in transmission electron microscopy, Ultramicroscopy 102 (2005), 209214 Google ScholarPubMed
5. Tiemeijer, P.C. Operation modes of a TEM monochromator. Inst. Phys. Conf. Ser. 161, 191194(1999).Google Scholar
6.The TitanTM platform is the basis of the TEAM project of the USA Department of Energy with the goal to arrive at 0.5 Angstrom resolution in TEM and STEM on a single system, in combination with a Cc corrector developed in co-operation with CEOS GmbH.Google Scholar
7. Lichte, H., Optimum focus for taking electron holograms, Ultramicroscopy 38 (1991), 13 Google Scholar