Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

R.D. Kelley; K. Song; B. Van Leer; D. Wall; L. Kwakman

doi:10.1017/S1431927613006302

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

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