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XAS and TEM Study of the TiN Thin Films Grown by the Pulsed DC Sputtering Technique Assisted by Balanced Magnetron.

Published online by Cambridge University Press:  31 July 2006

JA Duarte Moller ,
HE Esparza Ponce  and
C González Valenzuela
JA Duarte Moller
Affiliation:
Universidad de Sonora,Centro de Investigación en Materiales Avanzados
HE Esparza Ponce
Affiliation:
Centro de Investigación en Materiales Avanzados
C González Valenzuela
Affiliation:
Siemens de México

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1062 - 1063
Copyright
© 2006 Microscopy Society of America