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Win X-ray: A New Monte Carlo Program that Computes X-ray Spectra Obtained with a Scanning Electron Microscope

Published online by Cambridge University Press:  09 December 2005

Raynald Gauvin ,
Eric Lifshin ,
Hendrix Demers ,
Paula Horny  and
Helen Campbell
Raynald Gauvin
Affiliation:
Department of Metals and Materials Engineering, McGill University, Montréal, Québec H3A 2B2, Canada
Eric Lifshin
Affiliation:
College of Nanoscale Science and Engineering, University at Albany, CESTM, 251 Fuller Road, Albany, NY 12203, USA
Hendrix Demers
Affiliation:
Department of Metals and Materials Engineering, McGill University, Montréal, Québec H3A 2B2, Canada
Paula Horny
Affiliation:
Department of Metals and Materials Engineering, McGill University, Montréal, Québec H3A 2B2, Canada
Helen Campbell
Affiliation:
Department of Metals and Materials Engineering, McGill University, Montréal, Québec H3A 2B2, Canada
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Abstract

A new Monte Carlo program, Win X-ray, is presented that predicts X-ray spectra measured with an energy dispersive spectrometer (EDS) attached to a scanning electron microscope (SEM) operating between 10 and 40 keV. All the underlying equations of the Monte Carlo simulation model are included. By simulating X-ray spectra, it is possible to establish the optimum conditions to perform a specific analysis as well as establish detection limits or explore possible peak overlaps. Examples of simulations are also presented to demonstrate the utility of this new program. Although this article concentrates on the simulation of spectra obtained from what are considered conventional thick samples routinely explored by conventional microanalysis techniques, its real power will be in future refinements to address the analysis of sample classifications that include rough surfaces, fine structures, thin films, and inclined surfaces because many of these can be best characterized by Monte Carlo methods. The first step, however, is to develop, refine, and validate a viable Monte Carlo program for simulating spectra from conventional samples.

Keywords

X-ray microanalysisMonte Carloscanning electron microscopyenergy dispersive spectrometryelectron scattering
Type
MICROANALYSIS
Information
Microscopy and Microanalysis , Volume 12 , Issue 1 , February 2006 , pp. 49 - 64
Copyright
2006 Microscopy Society of America

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References

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