Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-26T14:52:57.745Z Has data issue: false hasContentIssue false
  • English
  • Français

A Wide Area Scanning Atomic Force Profiler

Published online by Cambridge University Press:  01 August 2004

A D Batchelor ,
Brian Galhouse ,
Dieter P Griffis ,
Fred A Stevie  and
Phillip E Russell
A D Batchelor
Affiliation:
North Carolina State University
Brian Galhouse
Affiliation:
KLA Tencor, Manassas, Virginia
Dieter P Griffis
Affiliation:
North Carolina State University
Fred A Stevie
Affiliation:
North Carolina State University
Phillip E Russell
Affiliation:
North Carolina State University
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1106 - 1107
Copyright
© 2004 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)