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What is the Effective Geometrical Collection Efficiency of Your XEDS Detector? A Routine Procedure Applied in a SEM Laboratory.

Published online by Cambridge University Press:  25 July 2016

Nanthawan Avishai ,
Amir Avishai  and
Vasile-Dan Hodoroaba
Nanthawan Avishai
Affiliation:
Swagelok Center for Surface Analysis of Materials, Department of Materials Science and Engineering, Cleveland, OH, USA.
Amir Avishai
Affiliation:
Swagelok Center for Surface Analysis of Materials, Department of Materials Science and Engineering, Cleveland, OH, USA.
Vasile-Dan Hodoroaba
Affiliation:
Federal Institute for Materials Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, Berlin, Germany.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 412 - 413
Copyright
© Microscopy Society of America 2016 

References

[1] Schamber, F Microsc. Microanal. 21(Suppl 3 (2015). p 1479.Google Scholar
[2] Procop, M, et al, Microsc. Microanal. 21(Suppl 3 (2015). p 1481.Google Scholar
[3] Procop, M Microsc. Microanal. 10 (2004). p 481.Google Scholar
[4] ISO 15632 (2012). “Microbeam Analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis”. ISO, Geneva.Google Scholar
[5] We would like to acknowledge the help of Dr. M Procop (Berlin, Germany) in application of the measurement procedure and drafting the abstract and Prof. Arthur Heuer (Case Western Reserve University) for his critical reviewing and editing of the manuscript.Google Scholar