Versatile Monochromator Module for XHR SEM

A Henstra; J Chmelik; T Dingle; A Mangnus; G van Veen

doi:10.1017/S1431927609096147

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

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Bhuiyan, Iftekhar U. Mouzon, Johanne Schröppel, Birgit Kaech, Andres Dobryden, Illia Forsmo, Seija P.E. and Hedlund, Jonas 2014. Microstructure of Bentonite in Iron Ore Green Pellets. Microscopy and Microanalysis, Vol. 20, Issue. 1, p. 33.

Ogawa, Takashi Cho, Boklae and Ahn, Sang Jung 2015. Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue. 6,

Ogawa, Takashi and Cho, Boklae 2015. A new monochromator with multiple offset cylindrical lenses 2: Aberration analysis and its applications. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 800, Issue. , p. 18.

Ogawa, Takashi and Cho, Boklae 2015. A new monochromator with multiple offset cylindrical lenses. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 772, Issue. , p. 5.

Ogawa, Takashi Cho, Boklae and Jung Ahn, Sang 2015. A Novel Monochromator with Double Cylindrical Lenses. Microscopy and Microanalysis, Vol. 21, Issue. S4, p. 112.

Ogawa, Takashi and Takai, Yoshizo 2018. Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 36, Issue. 3,

Ogawa, Takashi 2019. Evaluation of a monochromator with double cylindrical lenses for electron microscopy. International Journal of Modern Physics A, Vol. 34, Issue. 36, p. 1942006.

Kruit, Pieter 2020. Modern Developments in Vacuum Electron Sources. Vol. 135, Issue. , p. 251.

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Versatile Monochromator Module for XHR SEM

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