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Variable Pressure/Environmental SEM a Powerful Tool for Nanotechnology and Nanomanufacturing

Published online by Cambridge University Press:  01 August 2005

M T Postek
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland
A E Vladár
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Copyright
© 2005 Microscopy Society of America