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Variable Angle Spectroscopic Ellipsometry and Electron Energy-Loss Spectroscopy

Published online by Cambridge University Press:  23 September 2015

Jessica A. Alexander ,
Frank J. Scheltens ,
Lawrence F. Drummy ,
Michael F. Durstock ,
James B. Gilchrist ,
Sandrine E.M. Heutz  and
David W. McComb
Jessica A. Alexander
Affiliation:
Center for Electron Microscopy and Analysis, Department of Materials Science and Engineering, The Ohio State University, College Road, Columbus OH 43210, United States
Frank J. Scheltens
Affiliation:
Center for Electron Microscopy and Analysis, Department of Materials Science and Engineering, The Ohio State University, College Road, Columbus OH 43210, United States
Lawrence F. Drummy
Affiliation:
Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, Ohio 45433, United States
Michael F. Durstock
Affiliation:
Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, Ohio 45433, United States
James B. Gilchrist
Affiliation:
Department of Materials, Imperial College London, SW7 2AZ, United Kingdom
Sandrine E.M. Heutz
Affiliation:
Department of Materials, Imperial College London, SW7 2AZ, United Kingdom
David W. McComb
Affiliation:
Center for Electron Microscopy and Analysis, Department of Materials Science and Engineering, The Ohio State University, College Road, Columbus OH 43210, United States

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1471 - 1472
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Egerton, R.F. in “Electron Energy-Loss Spectroscopy in the Electron Microscope, Third Edition,” (Springer, New York).Google Scholar
[2] Tompkins, H.G. & Irene, E.A. in Handbook of Ellipsometry. (Springer, 2005).CrossRefGoogle Scholar
[3] Datta, D., Tripathi, V., et al, Thin Solid Films 516 (2008) 7237.CrossRefGoogle Scholar
[4] The authors acknowledge the Air Force Office of Scientific Research and the Air Force Research Laboratory (AFRL) Materials and Manufacturing Directorate for funding, Kurt Eynik and Luke Bissel from AFRL for technical support, and The Ohio State University Center for Electron Microscopy and Analysis for technical support.Google Scholar