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Validation of Minimum Electron Beam Dosage on Characterization of Carbon-Depletion in ULK Dielectric Materials by EELS Quantifications

Published online by Cambridge University Press:  01 August 2018

Wayne Zhao  and
Michael Gribelyuk
Wayne Zhao
Affiliation:
Center for Complex Analyses, GLOBALFOUNDRIES, Malta, New York, USA
Michael Gribelyuk
Affiliation:
Advanced Technology Development, GLOBALFOUNDRIES, Malta, New York, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1998 - 1999
Copyright
© Microscopy Society of America 2018 

References

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[4] Zhao, W., et al, Microscopy & Microanalysis 20(S3 2014) p. 362.Google Scholar
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[8] Authors would like to express sincere thanks to Cynthia Martin and Nikolaus Schad for their excellence in TEM-preparations. Thanks also go to Fab8 Characterization Management and Legal team for supports in the publication clearance..Google Scholar