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Utilizing Low-Dose Transmission Electron Microscopy for Structure and Defect Identification in Group III - Nitride Electronic Devices

Published online by Cambridge University Press:  01 August 2018

Petra Specht ,
Martina Luysberg ,
J. Chavez ,
T.R. Weatherford ,
T.J. Anderson ,
A.D. Koehler  and
C. Kisielowski
Petra Specht
Affiliation:
University of California, Berkeley, Dept. of Materials Science & Engineering, Berkeley, CA, USA
Martina Luysberg
Affiliation:
Ernst Ruska Centre, Research Centre Juelich, Juelich, Germany
J. Chavez
Affiliation:
University of California, Berkeley, Dept. of Materials Science & Engineering, Berkeley, CA, USA
T.R. Weatherford
Affiliation:
Naval Postgraduate School, Monterey, CA, USA
T.J. Anderson
Affiliation:
Naval Research Laboratory, Washington DC, USA
A.D. Koehler
Affiliation:
Naval Research Laboratory, Washington DC, USA
C. Kisielowski
Affiliation:
Lawrence Berkeley National Laboratory, Molecular Foundry, Berkeley, CA, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1972 - 1973
Copyright
© Microscopy Society of America 2018 

References

[1] Kisielowski, C., et al, Micron 68 2015) p. 186.Google Scholar
[2] Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.Google Scholar