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Using DTSA-II Tools for Electron-Excited X-ray Microanalysis of Thin Films
Published online by Cambridge University Press: 30 July 2021
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- Unresolved Challenges in Quantitative X-ray Microanalysis
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- Copyright
- Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America
References
Goldstein, J., Newbury, D., Michael, J., Ritchie, N., Scott, J., and Joy, D., Scanning Electron Microscopy and X-ray Microanalysis, 4th ed. (Springer, New York, 2018).CrossRefGoogle Scholar
Ritchie, N. (2018). NIST DTSA-II software, including tutorials. Available for free at: http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html (retrieved December 21, 2020).Google Scholar
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