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Using a Plasma FIB Equipped with Xe, N2, O2 and Ar for Atom Probe Sample Preparation – Ion Implantation and Success Rates

Published online by Cambridge University Press:  05 August 2019

Katja Eder ,
Vijay Bhatia ,
Brandon Van Leer  and
Julie M. Cairney
Katja Eder*
Affiliation:
Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, Australia.
Vijay Bhatia
Affiliation:
Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, Australia.
Brandon Van Leer
Affiliation:
Thermo Fisher Scientific 5350 NE Dawson Creek Drive, Hillsboro OR, USA.
Julie M. Cairney
Affiliation:
Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, Australia.
*
*Corresponding author: [email protected]

Abstract

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Type
Recent Developments in Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 316 - 317
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Tesch, P et al. , in “ISTFA 2008: Conference Proceedings from the 34th International Symposium for Testing and Failure Analysis”, ed. (ASM International, Materials Park) p. 7.Google Scholar
[2]Gault, B et al. , in “Atom Probe Microscopy”, (Springer, New York).Google Scholar
[3]Ziegler, JF, Ziegler, MD and Biersack, JP, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 268 (2010), p. 1818.Google Scholar