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The Use of Regularized Least Squares Minimization for the Deconvolution of SEM Images

Published online by Cambridge University Press:  27 August 2014

Eric Lifshin ,
Siwei Lyu ,
Yudhishthir R. Kandel  and
Richard Moore
Eric Lifshin
Affiliation:
College of Nanoscale Science and Engineering, University at Albany, State University of New York, Albany, NY, USA
Siwei Lyu
Affiliation:
Department of Computer Science, University at Albany, State University of New York, Albany, NY, USA
Yudhishthir R. Kandel
Affiliation:
College of Nanoscale Science and Engineering, University at Albany, State University of New York, Albany, NY, USA
Richard Moore
Affiliation:
RLM2 Analytical, Albany, NY, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 386 - 387
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Lifshin, E., Kandel, Y. and Moore, R. Microscopy and Microanalysis (2014) accepted for publication.Google Scholar
[2] Wang, Y., Yang, J., Yin, W., Zhang, Y. A New Alternating Minimization Algorithm for Total Variation Image Reconstruction, SIAM Journal of Imaging Sciences (2008) 1(3), 248-272.Google Scholar
[3] The authors acknowledge the support of Mr. Jeffrey Moskin, President of Nanojehm for providing the resources that made this study possible as well as TESCAN for providing instrumental support.Google Scholar