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Use of FIB to Identify Opens in Metal - Metal Bonds

Published online by Cambridge University Press:  27 August 2014

Nathan Wang ,
Jason Silva  and
George Perreault
Nathan Wang
Affiliation:
Maxim Integrated, San Jose CA, USA
Jason Silva
Affiliation:
Maxim Integrated, San Jose CA, USA
George Perreault
Affiliation:
Maxim Integrated, San Jose CA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1878 - 1879
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Reyntjens, S., Micromech., J. Microeng. 11 (2001) p. 287.Google Scholar
[2] Olden, E.C. Symp. Methods of Metallographic Specimen Preparation, ASTM (1960), p. 16.Google Scholar
[3] Ohya, K. “Imaging Using Electrons and Ion Beams”, Focused Ion Beam Systems, ed. N. Yao,Cambridge (2007), p. 108.Google Scholar