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Use Electrons Sparingly but Efficiently, the Battle to get All the Required Information Needed While Minimizing Dose and Maximizing Data Collection at the Highest Resolution

Published online by Cambridge University Press:  25 July 2016

Jan Ringnalda
Affiliation:
FEI Company, 5350 NE Dawson Creek Dr., Hillsboro, OR 97124
Arda Genc
Affiliation:
FEI Company, 5350 NE Dawson Creek Dr., Hillsboro, OR 97124
Eric Van Capellen
Affiliation:
FEI Company, 5350 NE Dawson Creek Dr., Hillsboro, OR 97124

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Bruley, J., et al, M&M conference proceedings 2010.Google Scholar
[2] Genc, A., et al, M&M Conference Proceedings 2014.Google Scholar