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Unpatterned Wafer Haze as a Monitor of Film Thickness Profile and Composition for Blanket Wafers Deposited by Atomic Layer Deposition

Published online by Cambridge University Press:  01 August 2010

K Beckwitt ,
B Donehoo ,
TB Tran ,
NM Perez-Paz ,
TE Glassman  and
CD Thomas
K Beckwitt
Affiliation:
Intel Corporation
B Donehoo
Affiliation:
Intel Corporation
TB Tran
Affiliation:
Intel Corporation
NM Perez-Paz
Affiliation:
Intel Corporation
TE Glassman
Affiliation:
Intel Corporation
CD Thomas
Affiliation:
Intel Corporation

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1296 - 1297
Copyright
Copyright © Microscopy Society of America 2010