Ultra-thin TEM Sample Preparation with Advanced Backside FIB Milling Method

H-J Kang; JH Kim; JW Oh; TS Back; HJ Kim

doi:10.1017/S1431927610054474

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

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Ultra-thin TEM Sample Preparation with Advanced Backside FIB Milling Method

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