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Towards Secondary Ion Mass Spectrometry On The Helium Ion Microscope

Published online by Cambridge University Press:  23 November 2012

T. Wirtz ,
L. Pillatsch ,
N. Vanhove ,
D. Dowsett ,
S. Sijbrandij  and
J. Notte
T. Wirtz
Affiliation:
Science and Analysis of Materials (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg
L. Pillatsch
Affiliation:
Science and Analysis of Materials (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg
N. Vanhove
Affiliation:
Science and Analysis of Materials (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg
D. Dowsett
Affiliation:
Science and Analysis of Materials (SAM), Centre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg
S. Sijbrandij
Affiliation:
Carl Zeiss NTS LLC, Peabody, MA
J. Notte
Affiliation:
Carl Zeiss NTS LLC, Peabody, MA
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 812 - 813
Copyright
Copyright © Microscopy Society of America 2012

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