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Towards Routine EDX Tomography in Semiconductor Failure Analysis

Published online by Cambridge University Press:  05 August 2019

Frieder H. Baumann ,
Brian Popielarski ,
Travis Mitchell  and
Yinggang Lu
Frieder H. Baumann*
Affiliation:
Globalfoundries, Malta, NY, USA.
Brian Popielarski
Affiliation:
Globalfoundries, Malta, NY, USA.
Travis Mitchell
Affiliation:
Globalfoundries, Malta, NY, USA.
Yinggang Lu
Affiliation:
Thermofisher Scientific, Hillsboro, OR, USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Theory and Applications of Electron Tomography in the Materials Sciences
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1820 - 1821
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Genç, A et al. , Microscopy and Analysis 116, p. 23.Google Scholar
[2]Lepinay, K et al. , Micron. 47 (2013), p. 43.Google Scholar
[3]Baumann, FH et al. , Microsc. Microanal. 22 (S3) (2016).Google Scholar
[4]Slater, TJA et al. , Ultramicroscopy 162 (2016), p. 61.Google Scholar