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Towards Quantitative 3D Chemical Analysis in TEM Using Quadrant XEDS Detector Geometry

Published online by Cambridge University Press:  27 August 2014

A. Genc
Affiliation:
FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USA
J. Ringnalda
Affiliation:
FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USA
H. Cheng
Affiliation:
FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USA
P. Fischione
Affiliation:
E.A. Fischione Instruments Inc., 9003 Corporate Circle, Export, PA, 15632, USA
M. Gu
Affiliation:
Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, P.O. Box, 999, Richland, WA 99352, USA
C.M. Wang
Affiliation:
Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, P.O. Box, 999, Richland, WA 99352, USA
L. Kovarik
Affiliation:
Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, P.O. Box, 999, Richland, WA 99352, USA
L. Pullan
Affiliation:
FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USA
B Freitag
Affiliation:
FEI Company, Achtseweg Noord 5, P.O. Box 80066, 5600 KA, Eindhoven, The Netherlands

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Midgley, P.A., etal., Ultramicroscopy 96 (2003) 413-431.Google Scholar
[2] Kotula, P.G., et al, Microscopy and Microanalysis (2007) 13.Google Scholar
[3] Genc, A., et al., Ultramicroscopy 108 (2008) 1603-1615.Google Scholar